diff --git a/src/arm/microchip/sama5d33.dtsi b/src/arm/microchip/sama5d33.dtsi
new file mode 100644
index 0000000..146fd59
--- /dev/null
+++ b/src/arm/microchip/sama5d33.dtsi
@@ -0,0 +1,13 @@
+// SPDX-License-Identifier: GPL-2.0-or-later
+/*
+ * sama5d33.dtsi - Device Tree Include file for SAMA5D33 SoC
+ *
+ *  Copyright (C) 2013 Boris BREZILLON <b.brezillon@overkiz.com>
+ */
+#include "sama5d3.dtsi"
+#include "sama5d3_lcd.dtsi"
+#include "sama5d3_gmac.dtsi"
+
+/ {
+	compatible = "atmel,sama5d33", "atmel,sama5d3", "atmel,sama5";
+};